Research Article Open Access

Optimal Pareto Solutions of a Dynamic C Chart: An Application of Statistical Process Control on a Semiconductor Devices Manufacturing Process

Toni Lupo1 and Filippo Sgroi2
  • 1 Dipartimento di Ingegneria Chimica, Gestionale, Informatica, Meccanica (DICGIM), Italy
  • 2 Department of Agricultural and Forest Sciences, Università degli Studi di Palermo, 90128 Palermo, Italy

Abstract

The present paper proposes a novel economic-statistical design procedure of a dynamic c control chart for the Statistical Process Control (SPC) of the manufacturing process of semiconductor devices. Particularly, a non-linear constrained mathematical programming model is formulated and solved by means of the ϵ-constraint method. A numerical application is developed in order to describe the Pareto frontier, that is the set of optimal c charts and the related practical considerations are given. The obtained results highlight how the performance of the developed dynamic c chart overcome that of the related static one, thus demonstrating the effectiveness of the proposed procedure.

American Journal of Applied Sciences
Volume 12 No. 4, 2015, 254-261

DOI: https://doi.org/10.3844/ajassp.2015.254.261

Submitted On: 23 February 2015 Published On: 28 May 2015

How to Cite: Lupo, T. & Sgroi, F. (2015). Optimal Pareto Solutions of a Dynamic C Chart: An Application of Statistical Process Control on a Semiconductor Devices Manufacturing Process. American Journal of Applied Sciences, 12(4), 254-261. https://doi.org/10.3844/ajassp.2015.254.261

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Keywords

  • Statistical Process Control
  • Dynamic C Chart
  • Multi-Objective Design
  • ε-Constraint Method
  • Semiconductor Devices Manufacturing